| |
Series GFC/GFM Gas
Mass Flow Controller/Meter |
| Flow Range up to 1000 l/min, Pressures
up to 500 psi, NIST Traceable |
| |
Series GFC/GFM Gas Mass Flow
Controllers/Meters combine a straight tube sensor with
a restrictor flow element to provide high accuracy and repeatability.
Flow rates are virtually unaffected by temperature and pressure
variations. Actual gas flow is displayed in engineering units
on a 3-1/2 digit, 90° tiltable LCD readout. Units can be
used with Series GFT Flow Totalizer for applications requiring
totalization. Series GFC/GFM includes a NIST traceable certificate.
Gas mass flow controllers utilize an electromagnetic valve
and PID electronics to maintain continuous control by comparing
measured sensor signal set to flow rates. Setpoints can be
adjusted with local potentiometers or remotely via 0 to 5 VDC
or 4 to 20 mA analog signal. |
| |
|
| |
| SPECIFICATIONS |
Service: Clean gases compatible with wetted
parts.
Wetted Materials: GFC/GFM-1XXX: Anodized Aluminum, Brass,
316 SS and Viton® O-rings; GFC/GFM-2XXX: 316 SS and Viton® O-rings.
Accuracy: ±1.5% FS including linearity over 59 to 77°F (5 to
25°C) and 5 to 60 psia (0.35 to 4 bar).
Repeatability: ±0.5% of full scale.
Response Time: 2 seconds to within ±2% of actual flow.
Output: Linear 0-5 VDC and 4-20 mA.
Max. Particulate Size: 5 microns.
Temperature Limits: 32 to 122°F (0 to 50°C).
Power Supply: ±12 VDC.
Process Connections: 1/4" compression fitting for flow rates ≤50 L/m;
3/8" for 100 and 200 L/m; 1/2" for 500 L/min; 3/4" for 1000 L/min.
Pressure Limits: 500 psig (34.5 bar).
Leak Integrity: 1 x 10-7 sccs of Helium.
Display: 90° tiltable, 3-1/2 digit.
Agency Approvals: CE. |
| |
| ACCESSORIES |
For Series GFC Gas Mass Flow Controllers
GFC-110P - 110V Power Supply
GFC-220PE - 220V Power Supply
GFC-CBL1 - 8 ft cable with 15-pin connector
GFC-CBL3 - 3 ft extension cable for LCD readout
IO-1 - 0-5 VDC to RS232 Input to Output Signal
Conditioner |
| |
For Series GFM Gas Mass
Flowmeters
GFM-110P - 110V Power Supply
GFM-220PE - 220V Power Supply
GFM-CBL4 - 8 ft cable for 4-20 mA output
GFC-CBL5 - 3 ft cable for 0-5 VDC output
IO-1 - 0-5 VDC to RS232 Input to Output Signal Conditioner |
| |
| Available Models: |
| Series GFC/GFM Gas Mass Flow Controller - Aluminum |
Series GFC/GFM Gas Mass Flow Controller - SS |
| Model
Number |
Flow
Range¹ |
| GFC-1101 |
0-10 sccm |
| GFC-1102 |
0-20 sccm |
| GFC-1103 |
0-50 sccm |
| GFC-1104 |
0-100 sccm |
| GFC-1105 |
0-200 sccm |
| GFC-1106 |
0-500 sccm |
| GFC-1107 |
0-1 l/min |
| GFC-1108 |
0-2 l/min |
| GFC-1109 |
0-5 l/min |
| GFC-1111 |
0-15 l/min |
| GFC-1131 |
0-30 l/min |
| GFC-1133 |
0-50 l/min |
| GFC-1142 |
0-100 l/min |
| GFC-1143 |
0-200 l/min |
| GFC-1144 |
0-500 l/min |
| GFC-1145 |
0-1000 l/min |
|
|
|
| Model
Number |
Flow
Range¹ |
| GFC-2101 |
0-10 sccm |
| GFC-2102 |
0-20 sccm |
| GFC-2103 |
0-50 sccm |
| GFC-2104 |
0-100 sccm |
| GFC-2105 |
0-200 sccm |
| GFC-2106 |
0-500 sccm |
| GFC-2107 |
0-1 l/min |
| GFC-2108 |
0-2 l/min |
| GFC-2109 |
0-5 l/min |
| GFC-2111 |
0-15 l/min |
| GFC-2131 |
0-30 l/min |
| GFC-2133 |
0-50 l/min |
| GFC-2142 |
0-100 l/min |
| GFC-2143 |
0-200 l/min |
| GFC-2144 |
0-500 l/min |
| GFC-2145 |
0-1000 l/min |
|
|
|
| |
|
| Series GFC/GFM Gas Mass Flow Meter - Aluminum |
Series GFC/GFM Gas Mass Flow Meter - SS |
| Model
Number |
Flow
Range¹ |
| GFM-1101 |
0-10 sccm |
| GFM-1102 |
0-20 sccm |
| GFM-1103 |
0-50 sccm |
| GFM-1104 |
0-100 sccm |
| GFM-1105 |
0-200 sccm |
| GFM-1106 |
0-500 sccm |
| GFM-1107 |
0-1 l/min |
| GFM-1108 |
0-2 l/min |
| GFM-1109 |
0-5 l/min |
| GFM-1111 |
0-15 l/min |
| GFM-1131 |
0-30 l/min |
| GFM-1133 |
0-50 l/min |
| GFM-1142 |
0-100 l/min |
| GFM-1143 |
0-200 l/min |
| GFM-1144 |
0-500 l/min |
| GFM-1145 |
0-1000 l/min |
|
|
|
| Model
Number |
Flow
Range¹ |
| GFM-2101 |
0-10 sccm |
| GFM-2102 |
0-20 sccm |
| GFM-2103 |
0-50 sccm |
| GFM-2104 |
0-100 sccm |
| GFM-2105 |
0-200 sccm |
| GFM-2106 |
0-500 sccm |
| GFM-2107 |
0-1 l/min |
| GFM-2108 |
0-2 l/min |
| GFM-2109 |
0-5 l/min |
| GFM-2111 |
0-15 l/min |
| GFM-2131 |
0-30 l/min |
| GFM-2133 |
0-50 l/min |
| GFM-2142 |
0-100 l/min |
| GFM-2143 |
0-200 l/min |
| GFM-2144 |
0-500 l/min |
| GFM-2145 |
0-1000 l/min |
|
|
|
|
| ¹Specified ranges are for an equivalent flow
of nitrogen at 70°F (21°C) @ 760 mm Hg. |
| |
| Previous Page |
| |
| |
